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Wuxi Songyu Technology Co., LTD

We are an intelligent equipment manufacturing enterprise specializing in the research and development, production and sales of photovoltaic and semiconductor process equipment.

PRODUCTS

The main products are: ALD, PECVD, LPCVD, atmospheric pressure, low pressure diffusion furnace, oxidation furnace, annealing furnace, graphene, carbon nanotube synthesis furnace, vertical vacuum furnace, hydrogen furnace, vacuum brazing, heat treatment furnace and other vacuum thermal equipment.

Half slice edge passivation equipment

1. The efficiency of half cell batteries is improved by more than 0.2%, making it suitable for new types of batteries such as TOPCon, HIT, xBC, etc 2. Large production capacity, 210 half piece production capacity>25000/h or 40000/h (two models) 3. Stacked film design ensures passivation effect, battery storage time, and improves component reliability; In addition, the design of low film thickness and low refractive index film layers ensures the appearance of the battery 4. Adopting low-temperature process design and tail row structure design to ensure film uniformity while reducing over plating (over plating range below 7mm) 5. The three functional chambers of preheating chamber, process chamber, and annealing chamber are designed with no exit chamber to ensure the production rhythm, while maximizing the passivation performance of the film layer and eliminating gate line oxidation interference

ALD atomic layer deposition equipment

Solar ALD atomic layer deposition is a kind of equipment that generates deposition film AL2O3 by alternately passing gas precursor TMA and H20 (or TMA and O3) pulses into the reaction chamber and chemically adsorbing on the deposition substrate. It is mainly applied to photovoltaic PERC, TOPCON and other new processes to improve the conversion efficiency of solar cells.

Diffusion Furnace

Diffusion furnace is a kind of heat processing equioment for wafers treatment such as diffusion,oxidiza-tion,anneal,alloy and sinterin which are using in semiconductor,discrete devices,photoelectronic,power electronic,solar battery and large scale integrated circuits and soon.lt is suitable for the wafer of 2~8 inch.

PECVD Plasma Chemical Vapor Deposition System

It is mainly used to deposit AlxOy, SiO2/SiOxNy and SixNy films on silicon wafers in the manufacture of crystalline silicon solar cells.

LPCVD Low Pressure Chemical Vapor Deposition Equipment

Songyu L PCVD low pressure chemical vapor deposition equipment, which makes gaseous compounds react on the substrate surface and deposit to form fixed solid films (SiOz, POLY Si, P+POLY Si) under low pressure by heating. At present, it is mainly used in TOPCon and POLO (POLY Si) battery technology.

Low pressure tubular high temperature boron phosphorus diffusion system/annealing furnace/oxidation furnace

Songyu boron and phosphorus diffusion furnace is the latest type of low-pressure diffusion furnace. The low-pressure diffusion is to make the reaction chamber in a vacuum state through the role of vacuum pump, and then pass the process gas. The diffusion process keeps the chamber in a stable and constant vacuum state, so as to ensure that the concentration of boron or phosphorus atoms in the chamber remains unchanged. As the free path of gas molecules increases under vacuum conditions, the adhesion ability of gas molecules on the silicon wafer surface is also greatly improved and a large amount of gas turbulence is avoided. At this time, boron or phosphorus atoms can be evenly distributed on the silicon wafer surface, and a layer of uniform impurity atoms are diffused on the silicon wafer surface, thus ensuring the uniformity of silicon wafer diffusion.

SONGYU TECHNOLOGY

HIGH-END SMARTEQUIPMENT MANUFACTURER

Songyu Technology is an intelligent equipment manufacturing enterprise specializing in the research and development, production and sales of photovoltaic and semiconductor process equipment. At present, the company's main products are: ALD, PECVD, LPCVD, atmospheric pressure, low pressure diffusion furnace, oxidation furnace, annealing furnace, graphene, carbon nanotube synthesis furnace, vertical vacuum furnace, hydrogen furnace, vacuum brazing, heat treatment furnace and other vacuum thermal equipment. Can be widely used in semiconductor integrated circuit, welding packaging, IGBT, MEMS, photovoltaic cell manufacturing and other new energy, new materials, vacuum electronics and magnetic materials and other fields, all kinds of technical indicators to reach the advanced level of domestic equipment manufacturing.

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Technical support

Advanced and mature process support, process control software lifetime free service, upgrade; Cost price equipment technology upgrade of non-replacement equipment; New process, new product technology and equipment support; Based on rich experience in line construction, process and equipment, we provide all kinds of technical consultation and support to customers for free before and after sale.

After-sales service

One-year warranty period; 24 hours service hotline, 24 hours service response; Lifelong after-sales service and spare parts supply; Equipment inspection maintenance and state adjustment at least twice a year.

NEWS

Pay attention to Songyu Technology, learn the latest information

2024-12-11

Good news! Songyu Equipment continues to blossom and bear fruit overseas

Song Yu is committed to the global layout. He has not only set up a number of service agents and offices in the world, but also set up a dedicated overseas technical team to serve customers in the United States, Taiwan, China, Southeast Asia, the Middle East, Africa, Europe, etc., so that he can quickly respond to the needs of local customers. To improve the quality and efficiency of international business services and empower customers to expand their global business, on the one hand, Songyu Overseas has a group of installation, commissioning, and after-sales engineers related to global supporting services; On the other hand, following Vietnam, Cambodia, Thailand, Laos, and with the orderly and in-depth work with customers in India, Egypt, Oman, Ethiopia, Türkiye, Songyu has built a global service and project management and control system to better serve customers.

2024-06-14

Semi slicing passivation equipment and process technology

Wuxi Songyu Technology Co., Ltd. is a high-tech enterprise that adheres to innovation, progress, pragmatism, and gratitude. It always adheres to the principles of standardization, rationalization, standardization, and efficiency, and is committed to the production and sales of photovoltaic and semiconductor process equipment. It focuses on the production of ALD, boron diffusion, LPCVD, phosphorus diffusion, annealing oxidation, PECVD equipment, and has obtained multiple invention patents, leading the industry.

2022-12-21

PERC upgrades the process equipment and technology of TOPCon

Wuxi Songyu Technology Co., Ltd., founded in December 2017, has a research and development team specializing in manufacturing and research and development of process equipment for 20 years, and has many senior equipment experts.