Home
About us
Products
Support
News
Partner
Contact us

Wuxi Songyu Technology Co., LTD

We are an intelligent equipment manufacturing enterprise specializing in the research and development, production and sales of photovoltaic and semiconductor process equipment.

PRODUCTS

The main products are: ALD, PECVD, LPCVD, atmospheric pressure, low pressure diffusion furnace, oxidation furnace, annealing furnace, graphene, carbon nanotube synthesis furnace, vertical vacuum furnace, hydrogen furnace, vacuum brazing, heat treatment furnace and other vacuum thermal equipment.

ALD atomic layer deposition equipment

Solar ALD atomic layer deposition is a kind of equipment that generates deposition film AL2O3 by alternately passing gas precursor TMA and H20 (or TMA and O3) pulses into the reaction chamber and chemically adsorbing on the deposition substrate. It is mainly applied to photovoltaic PERC, TOPCON and other new processes to improve the conversion efficiency of solar cells.

Diffusion Furnace

Diffusion furnace is a kind of heat processing equioment for wafers treatment such as diffusion,oxidiza-tion,anneal,alloy and sinterin which are using in semiconductor,discrete devices,photoelectronic,power electronic,solar battery and large scale integrated circuits and soon.lt is suitable for the wafer of 2~8 inch.

PECVD Plasma Chemical Vapor Deposition System

It is mainly used to deposit AlxOy, SiO2/SiOxNy and SixNy films on silicon wafers in the manufacture of crystalline silicon solar cells.

LPCVD Low Pressure Chemical Vapor Deposition Equipment

Songyu L PCVD low pressure chemical vapor deposition equipment, which makes gaseous compounds react on the substrate surface and deposit to form fixed solid films (SiOz, POLY Si, P+POLY Si) under low pressure by heating. At present, it is mainly used in TOPCon and POLO (POLY Si) battery technology.

Low pressure tubular high temperature boron phosphorus diffusion system/annealing furnace/oxidation furnace

Songyu boron and phosphorus diffusion furnace is the latest type of low-pressure diffusion furnace. The low-pressure diffusion is to make the reaction chamber in a vacuum state through the role of vacuum pump, and then pass the process gas. The diffusion process keeps the chamber in a stable and constant vacuum state, so as to ensure that the concentration of boron or phosphorus atoms in the chamber remains unchanged. As the free path of gas molecules increases under vacuum conditions, the adhesion ability of gas molecules on the silicon wafer surface is also greatly improved and a large amount of gas turbulence is avoided. At this time, boron or phosphorus atoms can be evenly distributed on the silicon wafer surface, and a layer of uniform impurity atoms are diffused on the silicon wafer surface, thus ensuring the uniformity of silicon wafer diffusion.

ALD Atomic Layer Deposition

Atomic laver deposition system can produce high guality thin-film. by using our advanced equipment which is more steady and reliable. Application example:High-K gate oxide, storage capacitive dielectrics,medium to high aspect ratio diffusion barriers for copper interconnects, 0LED pinhole-less passivation layers, high uniform WEWS coatings,Nano porous structure coatings, spectialty fiber doping, solar cells,flat panel display,optica film,several kinds ofother specialstructure Nano-film.

SONGYU TECHNOLOGY

HIGH-END SMARTEQUIPMENT MANUFACTURER

Songyu Technology is an intelligent equipment manufacturing enterprise specializing in the research and development, production and sales of photovoltaic and semiconductor process equipment. At present, the company's main products are: ALD, PECVD, LPCVD, atmospheric pressure, low pressure diffusion furnace, oxidation furnace, annealing furnace, graphene, carbon nanotube synthesis furnace, vertical vacuum furnace, hydrogen furnace, vacuum brazing, heat treatment furnace and other vacuum thermal equipment. Can be widely used in semiconductor integrated circuit, welding packaging, IGBT, MEMS, photovoltaic cell manufacturing and other new energy, new materials, vacuum electronics and magnetic materials and other fields, all kinds of technical indicators to reach the advanced level of domestic equipment manufacturing.

View more →

Technical support

Advanced and mature process support, process control software lifetime free service, upgrade; Cost price equipment technology upgrade of non-replacement equipment; New process, new product technology and equipment support; Based on rich experience in line construction, process and equipment, we provide all kinds of technical consultation and support to customers for free before and after sale.

After-sales service

One-year warranty period; 24 hours service hotline, 24 hours service response; Lifelong after-sales service and spare parts supply; Equipment inspection maintenance and state adjustment at least twice a year.

NEWS

Pay attention to Songyu Technology, learn the latest information

2022-12-21

PERC upgrades the process equipment and technology of TOPCon

Wuxi Songyu Technology Co., Ltd., founded in December 2017, has a research and development team specializing in manufacturing and research and development of process equipment for 20 years, and has many senior equipment experts.

2022-12-21

Songyu new generation PE poly equipment

With the national efforts to achieve carbon peaking and carbon neutralization, the entire energy system has been accelerating its transformation, especially photovoltaic power generation. Photovoltaic technology has also undergone generations of technological iterations, including a series of changes in silicon chip size and thickness. From the perspective of battery technology, traditional BSF technology, PERC technology, TOPCon/HJT/HPBC, TBC, etc, It is inseparable from the whole localization.

2022-12-21

TOPCon boron expansion equipment solution

Under the background of national 2030 carbon peak and 2060 carbon neutral development, photovoltaic industry can be said to be one of the most important energy solutions. At present, the main products in the photovoltaic industry are single crystal PERC products, whose LCOE kilowatt hour power is close to the parity grid connection. If the parity grid connection and lower LCOE are achieved, large-scale and high power are the two main means; At present, on the basis of PERC platform, to further improve efficiency, there are two technical solutions: TOPCon battery and heterojunction HJT battery; In combination with industrial technology development and scale effect to achieve cost reduction control, heterojunction HJT batteries are expected to require a certain period of time to polish. Because TOPCon batteries share more than 80% of the equipment with PERC batteries, it can be predicted that explosive growth will occur in a very short time, and it is also the only choice to achieve efficiency of more than 24+%. Wuxi Songyu Technology has accumulated many years of experience in TOPCon battery production equipment and can provide TOPCon with the following equipment: boron phosphorus co expansion furnace, phosphorus/annealing co expansion furnace, LPCVD, PECVD (polycrystalline silicon three in one), ALD tubular atomic layer deposition aluminum oxide, PECVD (SiNx, SiON), etc.