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Tel：+86-510-85300509
Fax：+86-510-85300539
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Address：Factory No.11, 9 Huanpu Road, Xinwu District, Wuxi City, Jiangsu Province
Diffusion Furnace
Diffusion furnace is a kind of heat processing equioment for wafers treatment such as diffusion,oxidiza-tion,anneal,alloy and sinterin which are using in semiconductor,discrete devices,photoelectronic,power electronic,solar battery and large scale integrated circuits and soon.lt is suitable for the wafer of 2~8 inch.
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Product description
Diffusion furnace is a kind of heat processing equioment for wafers treatment such as diffusion,oxidiza-tion,anneal,alloy and sinterin which are using in semiconductor,discrete devices,photoelectronic,power electronic,solar battery and large scale integrated circuits and soon.lt is suitable for the wafer of 2~8 inch.
ControlSystemfeatures
Storing multiple processing recipes with multiple steps for each
Automatic control with recipe
Pause/Continue function in auto-mode process
Ability to jump forcibly to every step in process
PID parameters Auto-Adjust
Storing multiple groups of PID parameters for running
System malfunction detection
Process ges program control function
Continuous operation at break point after power-off,etc
With high reliability main elements
With inde pendent intellectual property rights of the software system and reasonable HMI
With multipoint temperature compensation
With fault alarm and Interlock protectionWith historical records
★Functions might be added/deductde or developed according to the demands of custumers
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Address：Factory No.11, 9 Huanpu Road, Xinwu District, Wuxi City, Jiangsu Province
Tel：+86-510-85300509
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