-
ProductsSpecializing in photovoltaic and semiconductor process equipment research and development, production, sales
-
Contact usConstantly improve product quality, improve product reliability, wholeheartedly serve customers.
Products
Contact us
Tel：+86-19952255219
Web：www.wxsytech.com
Address：Factory No.11, 9 Huanpu Road, Xinwu District, Wuxi City, Jiangsu Province
LPCVD
The equipment is designed for the deposition of tunnel oxide layers and phosphorus‑doped poly‑Si layers on monocrystalline silicon solar cells. These films' quality and uniformity directly impact the cells' conversion efficiency and electrical performance parameters.
Category：
Product description
Product Function
The equipment is designed for the deposition of tunnel oxide layers and phosphorus‑doped poly‑Si layers on monocrystalline silicon solar cells. These films' quality and uniformity directly impact the cells' conversion efficiency and electrical performance parameters.
Product Specifications
| Equipment specifications | Standard value |
|---|---|
| Loading volume | M10: 2880 pcs/tube G12: 2200 pcs/tube |
| Size | 12100mm×2610mm×4700mm |
Product Advantages
- The special interlaced airflow quartz boat design and the vertical plug‑in wafer placement method have been patented.
- Paddle design, over 130kg land‑bearing.
- thickened quartz tube design to improve service life.
- Four‑stage heat field, multi‑stage temperature control, non‑uniformity ≤4%.
Related products
Message
Fast navigation
Address：Factory No.11, 9 Huanpu Road, Xinwu District, Wuxi City, Jiangsu Province
Tel：+86-19952255219
Copyright © 2022 Wuxi Songyu Technology Co., LTD
