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Wuxi Songyu Technology Co., LTD

We are an intelligent equipment manufacturing enterprise specializing in the research and development, production and sales of photovoltaic and semiconductor process equipment.

PRODUCTS

The main products are: ALD, PECVD, LPCVD, atmospheric pressure, low pressure diffusion furnace, oxidation furnace, annealing furnace, graphene, carbon nanotube synthesis furnace, vertical vacuum furnace, hydrogen furnace, vacuum brazing, heat treatment furnace and other vacuum thermal equipment.

ALD

The Planet series adopts a new duster design and cutting‑edge coating deposition technology to deposit multiple wafers on the surface of 02" to 12" wafers.And achieve complete conformal and high homogeneity of thin film deposition.

Vertical LPCVD

LPCVD is under low pressure and specific temperature conditions, through gas mixing chemical reaction, deposited solid film on the surface of silicon wafer, is one of the important equipment for semiconductor integrated circuit production, mainly suitable for silicon nitride film deposition, silicon dioxide film deposition, polysilicon film deposition, amorphous silicon film deposition and other processes.

Diffusion furnace / Oxidation furnace

Diffusion furnace/oxidation furnace is one of the important process equipment in the pre‑process of semiconductor production line, which is used for diffusion, oxidation, annealing, alloying and sintering processes in large‑scale integrated circuits, discrete devices, power electronics, photoelectric devices and optical fiber industries.

Vertical high temperature annealing furnace

High temperature annealing furnace is a heat treatment process called annealing in an inert atmosphere such as nitrogen under high temperature conditions.

MPCVD (Microwave Plasma Chemical Vapor Deposition)

Multi-Wall Carbon Nanotube Equipment

SONGYU TECHNOLOGY

HIGH-END SMARTEQUIPMENT MANUFACTURER

Songyu Technology is an intelligent equipment manufacturing enterprise specializing in the research and development, production and sales of photovoltaic and semiconductor process equipment. At present, the company's main products are: ALD, PECVD, LPCVD, atmospheric pressure, low pressure diffusion furnace, oxidation furnace, annealing furnace, graphene, carbon nanotube synthesis furnace, vertical vacuum furnace, hydrogen furnace, vacuum brazing, heat treatment furnace and other vacuum thermal equipment. Can be widely used in semiconductor integrated circuit, welding packaging, IGBT, MEMS, photovoltaic cell manufacturing and other new energy, new materials, vacuum electronics and magnetic materials and other fields, all kinds of technical indicators to reach the advanced level of domestic equipment manufacturing.

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Technical support

Advanced and mature process support, process control software lifetime free service, upgrade; Cost price equipment technology upgrade of non-replacement equipment; New process, new product technology and equipment support; Based on rich experience in line construction, process and equipment, we provide all kinds of technical consultation and support to customers for free before and after sale.

After-sales service

One-year warranty period; 24 hours service hotline, 24 hours service response; Lifelong after-sales service and spare parts supply; Equipment inspection maintenance and state adjustment at least twice a year.

NEWS

Pay attention to Songyu Technology, learn the latest information

2026-01-15

A New Breakthrough in Technology Going Global! Songyu Technology’s EPD Edge Passivation Equipment Gains Favored Recognition from Overseas Customers, Highlighting China’s Strong Competitiveness in Photovoltaic Equipment.

Recently, Wuxi Songyu Technology Co.,LTD has received good news from the international market—its independently developed EPD edge passivation equipment has successfully secured a contract with an overseas photovoltaic company. This is not merely an export of equipment; rather, it’s a vote of confidence by the customer, based on their long-term cooperative experience. It serves as strong evidence of Songyu Technology’s technological reliability, product stability, and comprehensive service capabilities on the global stage.

2025-12-01

Notice Regarding the Change of Our Company's Name

We would like to thank you for your long-term support and trust in our company! To optimize our corporate brand development, and with the approval of the market supervision and administration authorities, our company has completed the registration procedures for the name change. We hereby notify you of the relevant details as follows:

2025-12-01

Notification letter regarding the change of our company name