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Wuxi Songyu Technology Co., LTD

We are an intelligent equipment manufacturing enterprise specializing in the research and development, production and sales of photovoltaic and semiconductor process equipment.

PRODUCTS

The main products are: ALD, PECVD, LPCVD, atmospheric pressure, low pressure diffusion furnace, oxidation furnace, annealing furnace, graphene, carbon nanotube synthesis furnace, vertical vacuum furnace, hydrogen furnace, vacuum brazing, heat treatment furnace and other vacuum thermal equipment.

SEPD Half‑cut Wafer Edge Passivation Equipment

This equipment is specifically used for passivating the surfaces of solar cells that are damaged during the cutting process and subsequently depositing AlxOy thin films onto those surfaces.

TQS‑ALD Time‑sequential High‑capacity Tin Oxide Atomic Layer Deposition Equipment

This equipment is specifically designed to deposit tin dioxide (SnO₂) thin films for the production of perovskite /silicon tandem solar cells.

Plate‑type Large‑size Tin Oxide Atomic Layer Deposition Equipment

Spatial Atomic Layer Deposition (ALD) Process for Functional Thin‑Film Coating. A spatial atomic layer deposition (ALD) process is designed to deposit functional thin‑film materials on the surface of perovskite thin‑film solar cells. This advanced technique improves module efficiency and longevity by ensuring precise, uniform film deposition. The system is optimized for high‑speed coating of large‑sized glass substrates, integrated with automated production lines to deliver reliable, large‑scale mass‑production solutions for customer needs.

ALD Atomic Layer Deposition Equipment

Solar ALD Atomic Layer Deposition. This equipment utilizes alternating pulses of gas‑phase precursors (trimethylaluminum (TMA) and water vapor H₂O (or ozone O₃)) into the reaction chamber, where they chemisorb and react on the substrate surface to form a deposited Al₂O₃ film. Primarily applied in photovoltaic processes such as PERC (Passivated Emitter and Rear Cell), TOPCon (Tunnel Oxide Passivated Contact), and xBC (Back‑Contact). this technology enhances the conversion efficiency of solar cells by creating ultra‑thin, uniform dielectric films for superior surface passivation and electrical performance.

Low‑Pressure Diffusion System

The equipment uses a fully enclosed pressure diffusion process (completely isolated from external environment tail interference, ensuring full control over process quality; it also incorporates an exhaust gas treatment system for enhanced safety). Doping is performed in a high‑temperature zone, creating a PN junction on the silicon surface.

LPCVD Low‑Pressure Chemical Vapor Deposition Equipment

The equipment is designed for the deposition of tunnel oxide layers and phosphorus‑doped poly‑Si layers on monocrystalline silicon solar cells. These films' quality and uniformity directly impact the cells' conversion efficiency and electrical performance parameters.

SONGYU TECHNOLOGY

HIGH-END SMARTEQUIPMENT MANUFACTURER

Songyu Technology is an intelligent equipment manufacturing enterprise specializing in the research and development, production and sales of photovoltaic and semiconductor process equipment. At present, the company's main products are: ALD, PECVD, LPCVD, atmospheric pressure, low pressure diffusion furnace, oxidation furnace, annealing furnace, graphene, carbon nanotube synthesis furnace, vertical vacuum furnace, hydrogen furnace, vacuum brazing, heat treatment furnace and other vacuum thermal equipment. Can be widely used in semiconductor integrated circuit, welding packaging, IGBT, MEMS, photovoltaic cell manufacturing and other new energy, new materials, vacuum electronics and magnetic materials and other fields, all kinds of technical indicators to reach the advanced level of domestic equipment manufacturing.

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Technical support

Advanced and mature process support, process control software lifetime free service, upgrade; Cost price equipment technology upgrade of non-replacement equipment; New process, new product technology and equipment support; Based on rich experience in line construction, process and equipment, we provide all kinds of technical consultation and support to customers for free before and after sale.

After-sales service

One-year warranty period; 24 hours service hotline, 24 hours service response; Lifelong after-sales service and spare parts supply; Equipment inspection maintenance and state adjustment at least twice a year.

NEWS

Pay attention to Songyu Technology, learn the latest information

2026-01-15

A New Breakthrough in Technology Going Global! Songyu Technology’s EPD Edge Passivation Equipment Gains Favored Recognition from Overseas Customers, Highlighting China’s Strong Competitiveness in Photovoltaic Equipment.

Recently, Wuxi Songyu Technology Co.,LTD has received good news from the international market—its independently developed EPD edge passivation equipment has successfully secured a contract with an overseas photovoltaic company. This is not merely an export of equipment; rather, it’s a vote of confidence by the customer, based on their long-term cooperative experience. It serves as strong evidence of Songyu Technology’s technological reliability, product stability, and comprehensive service capabilities on the global stage.

2025-12-01

Notice Regarding the Change of Our Company's Name

We would like to thank you for your long-term support and trust in our company! To optimize our corporate brand development, and with the approval of the market supervision and administration authorities, our company has completed the registration procedures for the name change. We hereby notify you of the relevant details as follows:

2025-12-01

Notification letter regarding the change of our company name