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Tel：+86-19952255219
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Address：Factory No.11, 9 Huanpu Road, Xinwu District, Wuxi City, Jiangsu Province
TQS‑ALD
This equipment is specifically designed to deposit tin dioxide (SnO₂) thin films for the production of perovskite /silicon tandem solar cells.
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Product description
Product Function
This equipment is specifically designed to deposit tin dioxide (SnO₂) thin films for the production of perovskite /silicon tandem solar cells.
Product Specifications
| Equipment specifications | Standard value |
|---|---|
| Loading volume | 210105 Single‑insert @5nm: 1,350 pcs/h @ 1,600 pcs mounting 210105 Dual-insert @5nm: 2,600 pcs/h @ 3,200 pcs mounting |
| Size | 8000mm×4100mm×3000mm |
Product Advantages
- First‑time realization of high‑capacity design.
- Specialized gas inlet and dispersion structure with excellent dispersion and uniformity performance.
- Unique aluminum boat structural design ensures consistent coating uniformity on silicon wafers.
- Advanced temperature control system guarantees high thermal uniformity within the reaction chamber.
- Pressure adjustable according to specific process requirements.
- Comprehensive technical support and customer‑centric after‑sales service to provide continuous upgrades and technical assistance for customer's equipment needs.
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Address：Factory No.11, 9 Huanpu Road, Xinwu District, Wuxi City, Jiangsu Province
Tel：+86-19952255219
Copyright © 2022 Wuxi Songyu Technology Co., LTD
